NXQ 4008

R&D and Production Contact Mask Aligner

Substrate size from pieces to 200 mm diameter
Manual X, Y and theta alignment stage
Vacuum / Pressure contact exposure modes
Optical Splitfield and CCTV microscope options
Simple, topside mask loading
Low maintenance

Available Options:
• Infrared (IR) back side alignment (BSA)

• Optical back side alignment (OBS)

• Quadcam - 2 CCD Cameras per objective - Switch between Wide View and Hig Mag without Refocussing!
• UV / MUV / NUV / DUV exposure optics